On this paper, The brand new lapping slurry and polishing slurry are introduced. And also the deliquescence diploma of CLBO is fallen to cheapest. A whole new Doing work technologies is also adopted. Following tough polishing, the focus of ultra-precision polishing slurry is increased effectively. So does the extremely-precision polishing velocity, as well as the wiping velocity is quicker compared to deliquescence speed. The CLBO crystal floor roughness can realize 1nm and keep the surface high quality effectively. Entry by your establishment
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We summarized The present advancement standing on the high-power DUV laser both equally with the wavelength of FHG of your one-μm laser and at 193 nm. The recent advancement with the good-state/fiber laser, in addition to the nonlinear optical crystals, prompts don't just the common energy but in addition the beam high quality (coherence) from the DUV lasers to an unparalleled degree.
The typical power in the NIR laser nonetheless has the potential to get improved to tens of watts for instance 70 W [26] In the event the double-move configuration can be used with the Yb:YAG SCF amplifier stage. Consequently, In case the conversion performance of 31% from NIR to DUV might be even now managed at this greater energy problem, the typical output ability with the DUV laser at 258 nm could be more than twenty W, which would become a amazing energy stage for the DUV laser and bring on the unanticipated DUV laser machining final results. Furthermore, for top-energy DUV laser, the UV harm from the nonlinear crystal, including the Home windows for CLBO crystal along with the mirrors, is yet another vital parameter for long term and secure operation.
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On one other facet, the facility scaling from the NIR laser is yet another component to raise the common electricity from the 193-nm DUV laser. Because of the not enough the large-energy amplification solution from the NIR laser (for instance at 1553 nm), nonlinear frequency processes such as optical parameter click here oscillation (OPO) could be applied to build a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength and obtaining relative increased power [21]. Not long ago, a diamond Raman laser confirmed its capacity in obtaining a high electrical power along with a substantial conversion efficiency with the 1st Stokes from the 1-μm laser [22,23], which means the chance to get utilized from the 193-nm DUV laser technology as a consequence of its superior Raman obtain and large frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the simplest non-linear crystal which generates ultraviolet harmonics of the Nd:YAG fundamental laser wavelength. So as to improve the damage threshold, low CLBO area roughness, by ultra-precision machining, is needed. As the CLBO crystal has uncomplicated hydroscopic response and micro scratches in machining, extremely-exact machining of your CLBO crystal is a hard complex challenge.
The beam profile revealed in Figure 7b demonstrated an excellent beam high quality as one of many deserves of Raman laser, which might be valuable to crank out a 193-nm DUV laser with a high quality beam.
Its UV absorption edge reaches a hundred and eighty nm. The effective nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about twice as massive as that of KDP. CLBO crystals is often grown from your stoichiometric soften with lower viscosity.
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